MINA-NEWS
Towards generic MEMS
Expanding MEMS to new applications has proven to be difficult, because each new component requires a customized fabrication process. However, a Léti lab has developed the necessary building blocks and a generic fabrication process to make a variety of components with, typically, around a hundred technological steps. The first demo, an ultrasound transducer, was unveiled last fall and a new study has just begun on innovative acoustical components. The MEMSBond process is designed to fabricate components like gyrometers, accelerometers, and pressure sensors. It should also enable the integration of CMOS components, backside interconnections, and integrated packaging. Léti’s generic process can handle all but the most unusual requests.
Contact: jean-sebastien.danel@cea.fr
