New architecture MEMS microphone realization

Published : 8 November 2016

While MEMS microphones performances stagnate, specifications imposed by voice recongnition or noise cancellation are still not addressed.

The counter-electrode, placed in front of the membrane to realize a capacitive detection, is the main limit, by disturbing acoustic path.

Several ways are explored to remove the electrode and increase performances:

– Detection change: piezoelectricity (Vesper), piezoresistivity (CEA-Léti)

– Capacitive comb all around the membrane (Infineon)

A new architecture patented by CEA conserves capacitive detection and its avantages while removing induced noises. The thesis work is to design, produce and test a first device taking advantage of this architecture.

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