MINA-NEWS #18 - February 2012

Piezoresistive nanowires help MEMS slim down

MEMS can be scaled down by a factor of 3 to 4 without compromising performance thanks to piezoresistive silicon nanowire sensors. The nanowire sensors will also make it possible to include up to 11 sensitivity axes on a single chip.
Leti researchers working on a project funded by the French National Research Agency came up with the new development, which also resulted in the filing of several patent applications.
Because less silicon is needed, the smaller components will be cheaper to produce. And, thanks to an ultra-short-pulse power supply, they will also use less electricity.
The researchers also developed a 9-axis sensor (3 for the accelerometer, 3 for the magnetometer, and 3 for the gyroscope), which will also contain a pressure sensor and microphone. The new technology will be ready for transfer to industry within a year.

Contact: philippe.robert@cea.fr

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