Nanometric scale quantitative spectrometry
Published : 11 June 2019
Protocols and methods for elemental quantification based on EELS (electron energy loss spectroscopy) or EDX (energy dispersive X-ray spectroscopy) spectra acquired in a transmission electron microscope have been known for several decades. However, the uncertainty about the measurement can in general be relatively important. Today, a better understanding of physical phenomena and new developments in instrumentation and data processing allow to consider composition measurement with a better accuracy. Indeed, taking into account low energy X-ray absorption effects thanks to the zeta-factors method in EDX or simultaneous acquisition of low-loss and core-loss in EELS to overcome the effects of multiple scattering makes it possible to approach real elemental composition of materials. Finally, in recent years, state-of-the-art microscopes are able to simultaneously acquire EDX and EELS spectra (low-loss and core-loss). The main objective of the study will be to combine the two spectroscopies in order to optimize the elemental composition measurement accuracy needed for advanced microelectronics or photonic devices development.