Nanometric scale quantitative spectrometry

Published : 15 July 2019

Protocols and methods for elemental quantification based on EELS (electron energy loss spectroscopy) or EDX (energy dispersive X-ray spectroscopy) spectra acquired in a transmission electron microscope have been known for several decades. However, the uncertainty about the measurement can in general be relatively important. Today, a better understanding of physical phenomena and new developments in instrumentation and data processing allow to consider composition measurement with a better accuracy. Indeed, taking into account low energy X-ray absorption effects thanks to the zeta-factors method in EDX or simultaneous acquisition of low-loss and core-loss in EELS to overcome the effects of multiple scattering makes it possible to approach real elemental composition of materials. Finally, in recent years, state-of-the-art microscopes are able to simultaneously acquire EDX and EELS spectra (low-loss and core-loss). The main objective of the study will be to combine the two spectroscopies in order to optimize the elemental composition measurement accuracy needed for advanced microelectronics or photonic devices development.

More information
X