FEI extends joint lab for three more years

Categorie(s) : MINATEC, News, Research

Published : 2 April 2015

FEI, a US-based manufacturer of scanning electron microscopes (SEM) and transmission electron microscopes (TEM) has decided to extend its joint lab with the Nanocharacterization Platform (PFNC).

The joint lab was set up in 2010 to conduct research in two fields: fine tuning precession electron nanodiffraction to measure deformation at the nanometric scale with applications for tomorrow’s 14 nm nodes; and improving the hardware and software for a SEM x-ray tomography technique. FEI will now pursue this research for an additional three years, with the help of two new microscopes, a Quanta SEM with a field emission source, which has already been set up, and a Titan Themis TEM, which will arrive in April.

Contact: jean-claude.royer@cea.fr

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