90 results found


Ultrasonic Micro-transducers : High resolution c-MUTS

Offer N°: SL-DRT-15-0622

Start date: 1 Oct 2015

Capacitively actuated ultrasonic transducers (c-MUTS) are focusing the attention of R&D labs of major international companies. The applicative field for this type of MEMS is highly increasing especially in the biomedical and health domain, for cellular diagnosis and targeted medical treatment.


MEMS/NEMS sensors in liquid for biologcial or chemical applications

Offer N°: SL-DRT-15-0710

Start date: 1 Sep 2015

Micro-Electro-Mechanical Systems are nowadays key players in various industrial fields. There is currently a strong need for MEMS/NEMS solutions enabling rapid detection of trace amounts of biochemical compounds inside a liquid sample. MEMS/NEMS operation inside a liquid media imply a very particular set of constraints. Therefore the previously developed solutions for MEMS/NEMS sensors in air cannot be generalized to sensing in liquid media.


Etch Process developement for sub 10nm FEOL applications

Offer N°: SL-DRT-15-0706

Start date: 1 Oct 2015

For the 10nm CMOS technology and beyond, 3D Si or SiGe nanowire devices are envisionned. Plasma etching plays a key role in the fabrication of these high performance devices but we are facing more complexity and atomistic scale dimension control. There is a need to develop processes meeting technology requirements: 2D and 3D profile control and film integrity with an atomic precision. The LETI just got a new etch tool allowing to solve these issues.


Quality of Service management for distrubuted embedded systems

Offer N°: SL-DRT-15-0659

Start date: 1 Oct 2015

One of the great challenges of intelligent building and smart home is the interconnection of so called smart objects, whether they are integrated to the building (building management systems, home networks) or specific to the user (brown goods, white goods, portable goods). This interconnection is made difficult by the variety of technologies and the multidisciplinary nature of the objects involved.

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