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Enhancement of performances and stability of M&NEMS sensors with a resonance detection

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Start date : 1 October 2018

offer n° SL-DRT-18-0857

The MEMS Sensor Laboratory belonging to the Silicon Component Division at CEA Leti, as part of its microsystems activity, develops MEMS and NEMS devices under different collaborative projects.

Our attractivity towards our customers is based on both our expertise and technology platform (clean room of 8000m² and a technology portfolio in an unique place in the world), as well as our ability to develop new concepts (patent portfolio).

To overcome the limitations of existing MEMS technology, CEA-Leti has developed a new design and detection mode combining micro- and nano-electro-mechanical systems (M&NEMS) technologies. The basic idea is to combine on a same device a thick MEMS layer for the inertial mass with a thin and narrow NEMS part as suspended silicon nanowire strain gauge.

A large variety of sensors has already been developed and fabricated collectively on the same die (accelerometers, gyrometers, magnetometers, pressure sensors).

The laboratory has also developed an important knowledge on nano-resonators, being at the state of the art for mass spectrometry detection and gas sensing applications.

In this context, the PhD objective is to combine both expertises to realize M&NEMS inertial sensors and pressure sensors by replacing the nanowire strain gauge by a nano-resonator in order to address very high-performances sensors.

  • Keywords : Engineering science, Electronics and microelectronics - Optoelectronics, DCOS, Leti
  • Laboratory : DCOS / Leti
  • CEA code : SL-DRT-18-0857
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