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Integrated circuits for electromechanical tuning of MEMS devices

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Start date : 01/09/2021

offer n° SL-DRT-21-0837

The Phd objective is to explore electromechanical tuning techniques dynamically to modulate the resonant frequency and quality factor of electrically-coupled MEMS devices.

  • Keywords : Engineering sciences, Technological challenges, Cyber physical systems - sensors and actuators, Electronics and microelectronics - Optoelectronics, DCOS, Leti
  • Laboratory : DCOS / Leti
  • CEA code : SL-DRT-21-0837
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